Conference Paper
Jacobs, A. G.; Liedel, C.; Ober, C. K.; Thompson, M. O.: Understanding of PS-b-PMMA phase segregation under laser induced millisecond thermal annealing. In: Alternative Lithographic Technologies VII, 942309. Conference on Alternative Lithographic Technologies VII, San Jose, CA, February 23, 2015 - February 26, 2015. (2015)