Zeiss Gemini 1550

Specification:

• Thermal field emission gun
• Resolution at 1 kV: 3 nm
• Resolution at 20 kV: 1 nm
• Accelerating voltage: 0.2 to 30 kV
• Magnification: 20-900000x
• Probe current: 4 pA to 10 nA
• In-Lens Detector SE detector & ETD detector
• Backscattered electrons detector
• Oxford Instruments Energy-dispersive X-ray detector X-MAX 80mm²