SEM Gemini 1550 (Zeiss AG)

Specification:

  • Thermal field emission gun
  • Resolution at 1 kV: 3 nm
  • Resolution at 20 kV: 1 nm
  • Accelerating voltage: 0.2 to 30 kV
  • Magnification: 20-900000x
  • Probe current: 4 pA to 10 nA
  • In-Lens Detector SE detector & ETD detector
  • Backscattered electrons detector
  • Oxford Instruments Energy-dispersive X-ray detector X-MAX 80mm2
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